JPH043243Y2 - - Google Patents
Info
- Publication number
- JPH043243Y2 JPH043243Y2 JP17114384U JP17114384U JPH043243Y2 JP H043243 Y2 JPH043243 Y2 JP H043243Y2 JP 17114384 U JP17114384 U JP 17114384U JP 17114384 U JP17114384 U JP 17114384U JP H043243 Y2 JPH043243 Y2 JP H043243Y2
- Authority
- JP
- Japan
- Prior art keywords
- gauge
- voltage
- temperature
- pressure
- stress
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 19
- 239000013078 crystal Substances 0.000 claims description 14
- 230000004044 response Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17114384U JPH043243Y2 (en]) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17114384U JPH043243Y2 (en]) | 1984-11-12 | 1984-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6184836U JPS6184836U (en]) | 1986-06-04 |
| JPH043243Y2 true JPH043243Y2 (en]) | 1992-02-03 |
Family
ID=30728839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17114384U Expired JPH043243Y2 (en]) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH043243Y2 (en]) |
-
1984
- 1984-11-12 JP JP17114384U patent/JPH043243Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6184836U (en]) | 1986-06-04 |
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